规格产数
行业分类：
化工/陶瓷
品 牌：
拓吉泰
规格型号：
旋转靶/平面靶
产品详情
AZO靶材 AZO Target
产品说明Product description
AZO靶材是锌铝氧化物功能陶瓷材料，主要应用于磁控溅射制备AZO透明导电薄膜。采用粉末冶金，烧结工艺，多个靶管拼接贴合为AZO靶材成品。
AZO target is a functional zinc aluminum oxide ceramic material, which is used for deposition of AZO transparent conductive thin films with magnetron sputtering. It is produced by suing power metallurgy and sintering process, in the form of tube/planar segments that are bonded into AZO target.
AZO旋转靶/平面靶 Rotary/ Planar AZO target
组分Chemical composition (wt%) | Al2O3:ZnO = 2:98 |
纯度Purity (%) | ≥99.95 |
密度Density (g/cm3) | ≥5.56 |
相对密度Relative density (%) | ≥99.3 |
绑定贴合率Adhering ratio (%) | ≥98 % |
靶材尺寸Dimension
-靶材外径(Target outer diameter）∅151-160 mm
-钢管直径(Stainless steel tube diameters) OD 133 mm/ID 125 mm
-长度（Length）≤4 m
-按图纸要求加工(According to customized drawings)
应用领域Applications
-薄膜太阳能电池Thin film solar cells
-Low-E镀膜玻璃Low-E glasses
-汽车镀膜玻璃Automotive glasses
产品特点Product features
-密度高，成膜质量好。
High-density target leading to highquality films
-使用功率高，为13 kM/m。
Sputtering power of as high as 13 kW/m.
-溅射速率、使用效率比同类产品高。
Sputtering rate and utilization efficiency that are high than the products of competitors
