规格产数
行业分类：
化工/陶瓷
品 牌：
拓吉泰
规格型号：
旋转靶/平面靶
产品详情
喷涂硅铝靶材Spray SiAl Target
产品说明Product description
以等离子体为热源，在大气环境下通过一定的气氛保护装置，将Si+Al粉末加热到熔融或半熔融状态并高速冲击背管表面形成致密涂层，从而制备出高纯度、低氧含量、高致密度SiAl靶材。
With plasma as the heat source, high purity, low oxygen content, high density SiAl targets are produced by using Si and Al powders. Thestarting Si and Alpowders are heated to molten or semi-molten state with the protection of certain atmosphere and sprayed on the surface of backing tube at high speeds to form dense coatings.
项目Item | 参数Specifications | 检测手段 Testing method |
纯度Purity | ≥99.9% | |
Al含量Al Content | 8-10% | |
密度Density | ≥2.2 g/cm3 | |
杂质含量Impurities | Fe:≤350 ppm Ca:≤50 ppm Cu:≤50 ppm Mg: ≤20 ppm Ni:≤20 ppm O:≤6000 ppm N:≤500 ppm 杂质总和(O、N除外):≤1000 ppm Total impurity (excluding O, N) | ICP 氧氮分析仪 Oxygen and nitrogen analyzer |
电阻率Electrical resistivity | ≤50 mΩ∙cm | 四探针电阻率仪 Four-probe resistivity meter |
背管材质Backing tube
-选用304/316L不锈钢（无磁）
304/316L stainless steel (non-magnetic)
靶材尺寸Dimension
-按照图纸要求加工
According to customized drawings
应用领域Applications
-用于制作SiO2膜、Si3N4膜，主要用于光学玻璃AR膜，LOW-E镀膜玻璃，半导体电子器件，TFT-LCD，平面显示，触摸屏玻璃。
For deposition of SiO2and Si3N4films, which are used for AR films of optical glasses, LOW-E glasses, electronic devices, TFT-LCD, flat panel screens, touch screen glasses.
