规格产数
行业分类：
化工/陶瓷
品 牌：
拓吉泰
规格型号：
旋转靶/平面靶
产品详情
喷涂氧化钛/氧化锆靶材Spray TiOx/ZrOx Target
产品说明Product description
以等离子体为热源将相应粉末加热到熔融或半熔融状态并高速冲击背管表面形成致密涂层，从而制备出高纯度、高致密度TiOx，ZrOx靶材。
With plasma as the heat source, high purity high density TiOxamd ZrOxtargets are produced from respective powders, which are heated to molten or semi-molten state and deposited on the surface of backing tube at high speeds to form dense coatings.
氧化钛靶材TiOxtarget
项目Item | 参数Specifications | 检测手段 Testing method |
纯度Purity | ≥99.9% | |
密度Density | ≥4.0 g/cm3 | 阿基米德密度仪 Archimedes densimeter |
杂质含量 Impurities | SiO2:≤100ppm P2O5: ≤10 ppm SO2: ≤60 ppm Cu: ≤18 ppm Fe: ≤80 ppm 杂质总和(Total impurity):≤1000 ppm | 化学分析 Chemical analysis |
电阻率Electrical resistivity | ≤50 mΩ∙cm | 四探针电阻率仪 Four probe resistivity meter |
氧化锆靶材ZrOxtarget
项目Item | 参数Specifications | 检测手段Testing method |
纯度Purity | ≥99.9% | |
密度Density | ≥5.4 g/cm3 | 阿基米德密度仪 Archimedes densimeter |
杂质含量 Impurity content | Al: ≤100 ppm Cr: ≤50 ppm Ti: ≤100 ppm Fe: ≤200 ppm 杂质总和(Total impurity):≤1000 ppm | ICP |
电阻率Electrical resistivity | ≤0.5 Ω∙cm | 四探针电阻率仪 Four probe resistivity meter |
背管材质Backing tube
-选用304/316L不锈钢（无磁）。
304/316L stainless steel (non-magnetic).
靶材尺寸Dimension
-按照图纸要求加工
According to customized drawings.
应用领域Applications
-光学玻璃AR膜系AR films of optical glasses
-LOW-E镀膜玻璃LOW-E glasses
-工具镀膜和装饰镀膜Tool and decorative coatings
